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SPIE Proceedings [SPIE SPIE Nanoscience + Engineering - San Diego, California, United States (Sunday 28 August 2016)] Nanoengineering: Fabrication, Properties, Optics, and Devices XIII - Photovoltaic effects as the physical basis of a new generation of microelectromechanical sensors and systems (MEMS)
Campo, Eva M., Dobisz, Elizabeth A., Eldada, Louay A., Oskolkov, Boris, Filonov, Oleg, Prussak, NikolayVolume:
9927
Year:
2016
Language:
english
DOI:
10.1117/12.2236183
File:
PDF, 636 KB
english, 2016