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SPIE Proceedings [SPIE SPIE Nanoscience + Engineering - San Diego, California, United States (Sunday 28 August 2016)] Nanoengineering: Fabrication, Properties, Optics, and Devices XIII - Research on controlling middle spatial frequency error of high gradient precise aspheric by pitch tool
Campo, Eva M., Dobisz, Elizabeth A., Eldada, Louay A., Wang, Jia, Hou, Xi, Wan, Yongjian, Shi, Chunyan, Zhong, XianyunVolume:
9927
Year:
2016
Language:
english
DOI:
10.1117/12.2236800
File:
PDF, 595 KB
english, 2016