Compressive intrinsic stress originates in the grain boundaries of dense refractory polycrystalline thin films
Magnfält, D., Fillon, A., Boyd, R. D., Helmersson, U., Sarakinos, K., Abadias, G.Volume:
119
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4941271
Date:
February, 2016
File:
PDF, 1.55 MB
english, 2016