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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 28 August 2016)] Systems Contamination: Prediction, Control, and Performance 2016 - A new experimental procedure of outgassing rate measurement to obtain more precise deposition properties of materials
Egges, Joanne, Soares, Carlos E., Wooldridge, Eve M., Miyazaki, Eiji, Shimazaki, Kazunori, Numata, Osamu, Waki, Miyuki, Yamanaka, Riyo, Kimoto, YugoVolume:
9952
Year:
2016
Language:
english
DOI:
10.1117/12.2238312
File:
PDF, 876 KB
english, 2016