Structure and properties of Hf-O-N films prepared by...

Ceramics International 2017 / 05 Vol. 43; Iss. 7

Structure and properties of Hf-O-N films prepared by high-rate reactive HiPIMS with smoothly controlled composition

Belosludtsev, A., Houška, J., Vlček, J., Haviar, S., Čerstvý, R., Rezek, J., Kettner, M.
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Volume:
43
Language:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2017.01.102
Date:
May, 2017
File:
PDF, 1.05 MB
english, 2017
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