Impact of transmission non-uniformity of a wrinkled EUV...

Microelectronic Engineering 2017 / 06 Vol. 177

Impact of transmission non-uniformity of a wrinkled EUV pellicle for N5 patterning under various illuminations

Kim, In-Seon, Kim, Guk-Jin, Yeung, Michael, Barouch, Eytan, Oh, Hye-Keun
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Volume:
177
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.01.031
Date:
June, 2017
File:
PDF, 1.48 MB
english, 2017
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