[AIP STRESS-INDUCED PHENOMENA IN METALLIZATION: Tenth...

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[AIP STRESS-INDUCED PHENOMENA IN METALLIZATION: Tenth International Workshop on Stress-Induced Phenomena in Metallization - Austin (Texas) (5–7 November 2008)] AIP Conference Proceedings - Nanoindentation of Si Nanostructures: Buckling and Friction at Nanoscales

Huang, Huai, Li, Bin, Zhao, Qiu, Luo, Zhiquan, Im, Jay, Kang, Min K., Allen, Richard A., Cresswell, Michael W., Huang, Rui, Ho, Paul S., Ho, Paul S., Zschech, Ehrenfried, Ogawa, Shinichi
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Year:
2009
Language:
english
DOI:
10.1063/1.3169260
File:
PDF, 1.72 MB
english, 2009
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