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Characterization of thin film deposits on tungsten filaments in catalytic chemical vapor deposition using 1,1-dimethylsilacyclobutane
Shi, Yujun, Tong, Ling, Mulmi, SureshVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4961932
Date:
September, 2016
File:
PDF, 1.77 MB
english, 2016