Recrystallization of Ge thin film on SiO2substrates using a two-step annealing process
Kim, Sung Wook, Lee, Jaejun, Park, Youn Ho, Park, Jeong Min, Do, Hong Kyeong, Kim, Yeon Joo, Choi, Heon-JinVolume:
13
Language:
english
Journal:
Electronic Materials Letters
DOI:
10.1007/s13391-017-6198-2
Date:
January, 2017
File:
PDF, 1.21 MB
english, 2017