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Modeling the influence of incident angle and deposition rate on a nanostructure grown by oblique angle deposition
Li, Kun-Dar, Dong, Yu-WeiVolume:
50
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aa51b0
Date:
February, 2017
File:
PDF, 2.55 MB
english, 2017