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Ion velocity distribution functions in argon and helium discharges: detailed comparison of numerical simulation results and experimental data
Wang, Huihui, Sukhomlinov, Vladimir S, Kaganovich, Igor D, Mustafaev, Alexander SVolume:
26
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/26/2/024002
Date:
January, 2017
File:
PDF, 1.68 MB
english, 2017