Identification and Elimination of Hygro-Thermo- Mechanical...

Journal of Microelectromechanical Systems 2017 / 4 Vol. 26; Iss. 2

Identification and Elimination of Hygro-Thermo- Mechanical Stress-Effects in a High-Precision MEMS Pressure Sensor

Sandvand, Asmund, Halvorsen, Einar, Aasmundtveit, Knut E., Jakobsen, Henrik
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Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2017.2651162
Date:
April, 2017
File:
PDF, 2.52 MB
english, 2017
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