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Design, fabrication, characterization of micromachined capacitive shunt switches with low actuation voltages and low temperature packaging
Lakshmi, S., Manohar, Premila, Natarajan, K., Naga Sayanu, P.Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3290-3
Date:
February, 2017
File:
PDF, 2.34 MB
english, 2017