Kinetic Monte Carlo method for the simulation of...

Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz

Zhang, Hui, Xing, Yan, Li, Yuan, Gosálvez, Miguel A., Qiu, Xiaoli
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Volume:
256
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.01.008
Date:
April, 2017
File:
PDF, 3.16 MB
english, 2017
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