Reactive Distillation-Aided Ultrapure Silane Production...

Industrial & Engineering Chemistry Research 2017 / 02 Vol. 56; Iss. 7

Reactive Distillation-Aided Ultrapure Silane Production from Trichlorosilane: Process Simulation and Optimization

Li, Xue-Gang, Huang, Xun, Xiao, Wen-De
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Volume:
56
Language:
english
Journal:
Industrial & Engineering Chemistry Research
DOI:
10.1021/acs.iecr.6b03076
Date:
February, 2017
File:
PDF, 1.21 MB
english, 2017
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