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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Characterization of an RF plasma ion source for ion implantation
Kopalidis, Peter M., Wan, ZhiminYear:
2012
Language:
english
DOI:
10.1063/1.4766552
File:
PDF, 237 KB
english, 2012