Experimental investigations of electron heating dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms
Berger, Birk, Brandt, Steven, Franek, James, Schüngel, Edmund, Koepke, Mark, Mussenbrock, Thomas, Schulze, JulianVolume:
118
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4937403
Date:
December, 2015
File:
PDF, 3.90 MB
english, 2015