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[IEEE 2016 13th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) - Mexico City, Mexico (2016.9.26-2016.9.30)] 2016 13th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) - 3-layered capacitive structure design for MEMS inertial sensing
Granados-Rojas, B., Reyes-Barranca, M. A., Abarca-Jimenez, G. S., Flores-Nava, L. M., Moreno-Cadenas, J.A.Year:
2016
Language:
english
DOI:
10.1109/iceee.2016.7751236
File:
PDF, 400 KB
english, 2016