[IEEE 2016 IEEE SENSORS - Orlando, FL, USA (2016.10.30-2016.11.3)] 2016 IEEE SENSORS - A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology
Konishi, Toshifumi, Safu, Teruaki, Machida, Katsuyuki, Yamane, Daisuke, Sone, Masato, Masu, Kazuya, Toshiyoshi, HiroshiYear:
2016
Language:
english
DOI:
10.1109/icsens.2016.7808793
File:
PDF, 1015 KB
english, 2016