Order-of-magnitude differences in retention of low-energy...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 09 Vol. 34; Iss. 5

Order-of-magnitude differences in retention of low-energy Ar implanted in Si and SiO 2

Wittmaack, Klaus, Giordani, Andrew, Umbel, Rachel, Hunter, Jerry L.
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4961574
Date:
September, 2016
File:
PDF, 2.27 MB
english, 2016
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