Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 11 Vol. 34; Iss. 6
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Influence of hydrogen passivation on the luminescence of Si quantum dots embedded in Si 3 N x
Cadogan, Carolyn C., Goncharova, Lyudmila V., Simpson, Peter J., Nguyen, Peter H., Wang, Zhiqang Q., Sham, Tsun-KongVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4963369
Date:
November, 2016
File:
PDF, 1.40 MB
english, 2016