Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 11 Vol. 34; Iss. 6
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Induction-heated nanoimprint on soda-lime glass using sapphire molds
Cai, Jingxuan, Li, Shijie, Guo, Xu, Ge, Haixong, Li, Wen-DiVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4966557
Date:
November, 2016
File:
PDF, 2.37 MB
english, 2016