Prediction of sawing force for single-crystal silicon...

Materials Science in Semiconductor Processing 2017 / 06 Vol. 63

Prediction of sawing force for single-crystal silicon carbide with fixed abrasive diamond wire saw

Wang, Peizhi, Ge, Peiqi, Gao, Yufei, Bi, Wenbo
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Volume:
63
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2017.01.014
Date:
June, 2017
File:
PDF, 1.09 MB
english, 2017
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