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[IEEE 2016 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2016.12.3-2016.12.7)] 2016 IEEE International Electron Devices Meeting (IEDM) - Encapsulated inertial systems

Ahn, C. H., Christensen, D. L., Heinz, D. B., Hong, V. A., Ng, E. J., Rodriguez, J., Yang, Y., O'Brien, G., Kenny, T. W.
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Year:
2016
Language:
english
DOI:
10.1109/IEDM.2016.7838484
File:
PDF, 367 KB
english, 2016
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