Anchor Loss in Hemispherical Shell Resonators

Journal of Microelectromechanical Systems 2017 / 2 Vol. 26; Iss. 1

Anchor Loss in Hemispherical Shell Resonators

Darvishian, Ali, Shiari, Behrouz, Cho, Jae Yoong, Nagourney, Tal, Najafi, Khalil
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Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2016.2636080
Date:
February, 2017
File:
PDF, 3.63 MB
english, 2017
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