Crystal thickness and extinction distance measurements by...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 09 Vol. 33; Iss. 5

Crystal thickness and extinction distance measurements by convergent beam electron diffraction fitting and application in quantitative TEM holography analysis on p-n junctions

Zhu, Jie, Tan, Pik Kee, Tan, Hao, Wang, Dan Dan, Huang, Ya Min, Chen, Chang Qing, Liu, Bing Hai, Er, Eddie, Zhao, Si Ping, Lam, Jeffrey, Mai, Zhi Hong
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4929987
Date:
September, 2015
File:
PDF, 3.77 MB
english, 2015
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