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[ASME ASME 2009 Dynamic Systems and Control Conference - Hollywood, California, USA (October 12–14, 2009)] ASME 2009 Dynamic Systems and Control Conference, Volume 1 - Mechatronics and Control of a Precision Motion Stage for Nano-Manufacturing
Ruben, Shalom D., Tsao, Tsu-Chin, Hocken, Robert J., Fesperman, Ronnie, Ozturk, Ozkan, Brien, John, Caskey, GregYear:
2009
Language:
english
DOI:
10.1115/DSCC2009-2761
File:
PDF, 376 KB
english, 2009