Design of an electron-optical system with a ball-tip emission source through a numerical optimization method for high-throughput electron-beam–direct-write lithography
Lee, Hsuan-Ping, Chen, Sheng-Yung, Liu, Chun-Hung, Ding, Qi, Shen, Yu-Tian, Tsai, Kuen-YuVolume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.06FD01
Date:
June, 2015
File:
PDF, 1.28 MB
english, 2015