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A comprehensive study of the impact of dislocation loops on leakage currents in Si shallow junction devices
Nyamhere, C., Scheinemann, A., Schenk, A., Scheit, A., Olivie, F., Cristiano, F.Volume:
118
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4935293
Date:
November, 2015
File:
PDF, 3.09 MB
english, 2015