Analysis of non-equilibrium phenomena in inductively...

Physics of Plasmas 2016 / 07 Vol. 23; Iss. 7

Analysis of non-equilibrium phenomena in inductively coupled plasma generators

Zhang, W., Lani, A., Panesi, M.
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Volume:
23
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4958326
Date:
July, 2016
File:
PDF, 1.78 MB
english, 2016
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