A self-decoupling piezoresistive sensor for measuring microforce in horizontal and vertical directions
Zhou, Jie, Rong, Weibin, Wang, Lefeng, Gao, Peng, Sun, LiningVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/9/095019
Date:
September, 2016
File:
PDF, 1.73 MB
english, 2016