In situ collector cleaning and extreme...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 03 Vol. 34; Iss. 2

In situ collector cleaning and extreme ultraviolet reflectivity restoration by hydrogen plasma for extreme ultraviolet sources

Elg, Daniel T., Sporre, John R., Panici, Gianluca A., Srivastava, Shailendra N., Ruzic, David N.
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4942456
Date:
March, 2016
File:
PDF, 1.90 MB
english, 2016
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