Dose performance characterization of extreme ultraviolet...

Dose performance characterization of extreme ultraviolet exposure system using enhanced energy sensitivity by resist contrast method

Kim, Insung, Heo, JinSeok, Park, Changmin, Hwang, Myeongsu, Kim, Seong-Sue, Hahn, Jae W.
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4945806
Date:
July, 2016
File:
PDF, 2.42 MB
english, 2016
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