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[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Controlling Macropores Etching in n-Si by Means of in-situ FFT Voltage- and Photoimpedance Spectroscopy
Foca, Eugen, Carstensen, Juergen, Popkirov, Georgi, Foell, HelmutVolume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2731202
File:
PDF, 838 KB
english, 2007