The role of hydrophobic silane coating on Si stamps in nanoimprint lithography
Amirsadeghi, Alborz, Brumfield, Lance, Choi, Junseo, Brown, Emily, Lee, Jae Jong, Park, SunggookVolume:
121
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4974533
Date:
January, 2017
File:
PDF, 728 KB
english, 2017