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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Applied Quantum X Implant System: Technology Enhancements to Enable Production-Worthy Performance at the 45 nm Node
Murrell, Adrian, Edwards, Peter, Goldberg, Richard, Banks, Peter, Mitchell, Bob, Collart, Erik, Morley, Sean, Ryding, Geoffrey, Smick, Theodore, Farley, Marvin, Sakase, Takao, Hacker, David, KindersleVolume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401593
File:
PDF, 204 KB
english, 2006