18-MHz Silicon Lamé Mode Resonators With Corner and Central...

Journal of Microelectromechanical Systems 2017 / 2 Vol. 26; Iss. 1

18-MHz Silicon Lamé Mode Resonators With Corner and Central Anchor Architectures in a Dual-Wafer SOI Technology

Elsayed, Mohannad Y., Nabki, Frederic
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Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2016.2607118
Date:
February, 2017
File:
PDF, 3.09 MB
english, 2017
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