Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 03 Vol. 35; Iss. 2
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Influence of symmetry and duty cycles on the pattern generation in achromatic Talbot lithography
Yang, Shumin, Zhao, Jun, Wang, Liansheng, Zhu, Fangyuan, Xue, Chaofan, Liu, Haigang, Sang, Huazheng, Wu, Yanqing, Tai, RenzhongVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4974930
Date:
March, 2017
File:
PDF, 3.06 MB
english, 2017