AlN thin films deposited by DC reactive magnetron...

The European Physical Journal Applied Physics 2013 / 11 Vol. 64; Iss. 2

AlN thin films deposited by DC reactive magnetron sputtering: effect of oxygen on film growth

García Molleja, Javier, Gómez, Bernardo José, Ferrón, Julio, Gautron, Eric, Bürgi, Juan, Abdallah, Bassam, Djouadi, Mohamed Abdou, Feugeas, Jorge, Jouan, Pierre-Yves
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Volume:
64
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap/2013130445
Date:
November, 2013
File:
PDF, 855 KB
english, 2013
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