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[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Manufacturing Assessment of an XeF[sub 2] In-Situ Clean Process for Mitigation of Species Cross Contamination
Dunn, James P., Rolland, James L., Lundquist, Paul, Bishop, Steve, Seebauer, Edmund G., Felch, Susan B., Jain, Amitabh, Kondratenko, Yevgeniy V.Year:
2008
Language:
english
DOI:
10.1063/1.3033638
File:
PDF, 856 KB
english, 2008