[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Improved Re-Crystallization of p[sup +] Poly-Si Gates with Molecular Ion Implantation
Lee, Jin-Ku, Ju, Min-Ae, Oh, Jae-Geun, Hwang, Sun-Hwan, Jeon, Seung-Joon, Ku, Ja-Chun, Park, Sungki, Lee, Kyung-Won, Kim, Steve, Ra, Geum-Joo, Reece, Ron, Rubin, Leonard M., Krull, W. A., Cho, H. T.,Year:
2008
Language:
english
DOI:
10.1063/1.3033645
File:
PDF, 3.36 MB
english, 2008