In situ oxygen plasma cleaning of microswitch...

Journal of Micromechanics and Microengineering 2016 / 11 Vol. 26; Iss. 11

In situ oxygen plasma cleaning of microswitch surfaces—comparison of Ti and graphite electrodes

Oh, Changho, Streller, Frank, Ashurst, W Robert, Carpick, Robert W, de Boer, Maarten P
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Volume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/11/115020
Date:
November, 2016
File:
PDF, 1.80 MB
english, 2016
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