Uniform dehydrogenation of amorphous silicon thin films...

Semiconductor Science and Technology 2017 / 02 Vol. 32; Iss. 2

Uniform dehydrogenation of amorphous silicon thin films using a wide thermal annealing system

Jung, Yong Chan, Seong, Sejong, Lee, Taehoon, Ahn, Jinho, Kim, Tae Hyun, Yeo, Won-Jae, Park, In-Sung
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Volume:
32
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/32/2/025007
Date:
February, 2017
File:
PDF, 1.47 MB
english, 2017
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