Fabrication of high aspect ratio TiO 2...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 05 Vol. 34; Iss. 3

Fabrication of high aspect ratio TiO 2 and Al 2 O 3 nanogratings by atomic layer deposition

Shkondin, Evgeniy, Takayama, Osamu, Lindhard, Jonas Michael, Larsen, Pernille Voss, Mar, Mikkel Dysseholm, Jensen, Flemming, Lavrinenko, Andrei V.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4947586
Date:
May, 2016
File:
PDF, 1.84 MB
english, 2016
Conversion to is in progress
Conversion to is failed