Investigation of TiN thin film oxidation depending on the...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 09 Vol. 34; Iss. 5

Investigation of TiN thin film oxidation depending on the substrate temperature at vacuum break

Piallat, Fabien, Gassilloud, Remy, Caubet, Pierre, Vallée, Christophe
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4960648
Date:
September, 2016
File:
PDF, 1.26 MB
english, 2016
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