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SPIE Proceedings [SPIE SPIE/COS Photonics Asia - Beijing, China (Wednesday 12 October 2016)] Optical Metrology and Inspection for Industrial Applications IV - Numerical calibration of laser line scanning system with multiple sensors for inspecting cross-section profiles
Han, Sen, Yoshizawa, Toru, Zhang, Song, Zhou, Jingbo, Li, Yuehua, Huang, Fengshan, Liu, LijianVolume:
10023
Year:
2016
Language:
english
DOI:
10.1117/12.2246303
File:
PDF, 890 KB
english, 2016