Etching of semiconductors and metals by the photonic jet with shaped optical fiber tips
Pierron, Robin, Lecler, Sylvain, Zelgowski, Julien, Pfeiffer, Pierre, Mermet, Frédéric, Fontaine, JoëlLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.01.277
Date:
January, 2017
File:
PDF, 964 KB
english, 2017