Statistical Dependence of Gate Metal Work Function on Various Electrical Parameters for an n-Channel Si Step-FinFET
Saha, Rajesh, Bhowmick, Brinda, Baishya, SrimantaVolume:
64
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2017.2657233
Date:
March, 2017
File:
PDF, 2.29 MB
english, 2017