Fabrication of Thin-Film Silicon Membranes With Phononic...

IEEE Electron Device Letters 2016 / 10 Vol. 37; Iss. 10

Fabrication of Thin-Film Silicon Membranes With Phononic Crystals for Thermal Conductivity Measurements

Haras, Maciej, Lacatena, Valeria, Bah, Thierno Moussa, Didenko, Stanislav, Robillard, Jean-Francois, Monfray, Stephane, Skotnicki, Thomas, Dubois, Emmanuel
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Volume:
37
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2016.2600590
Date:
October, 2016
File:
PDF, 1.03 MB
english, 2016
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