Mechanistic modeling study of atomic layer deposition...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2017 / 01 Vol. 35; Iss. 1

Mechanistic modeling study of atomic layer deposition process optimization in a fluidized bed reactor

Duan, Chen-Long, Zhu, Peng-Hui, Deng, Zhang, Li, Yun, Shan, Bin, Fang, Hai-Sheng, Feng, Guang, Chen, Rong
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4964848
Date:
January, 2017
File:
PDF, 2.49 MB
english, 2017
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